SPT-20 ion Sputter Coater
The SPT-20 Sputter Coater is a compact ion coating system ideal to support table-top SEM's. The system is able to sputter noble metals such as gold (Au), palladium (Pd), platinum (Pt), and silver (Ag) for non-conductive or poorly conductive specimens.
It can be used as an electrode formation of a thin film type.
Target | AU& PT (Guarantee) |
---|---|
Target Size | 50mm |
Power | AC 110-240V, 50/60Hz, 50W (except rotary pump) |
Ionization Current | 0~9mA |
Chamber Size | 100mm [Dia] |
Dimension | 420(W)*220(D)*230(H)mm |
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